US 12,111,575 B2
Coater with automatic cleaning function and coater automatic cleaning method
Hui Wang, Shanghai (CN); Fuping Chen, Shanghai (CN); Wenjun Wang, Shanghai (CN); Hongchao Yang, Shanghai (CN); Voha Nuch, Shanghai (CN); Fufa Chen, Shanghai (CN); Jian Wang, Guangzhou (CN); Xiaoyan Zhang, Shanghai (CN); and Shu Yang, Shanghai (CN)
Assigned to ACM RESEARCH (SHANGHAI) INC., Shanghai (CN)
Filed by ACM Research (Shanghai) Inc., Shanghai (CN)
Filed on Oct. 26, 2020, as Appl. No. 17/080,396.
Application 17/080,396 is a continuation of application No. 15/511,547, granted, now 10,816,901, previously published as PCT/CN2014/086644, filed on Sep. 16, 2014.
Prior Publication US 2021/0072645 A1, Mar. 11, 2021
Int. Cl. G03F 7/16 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01)
CPC G03F 7/162 (2013.01) [H01L 21/67086 (2013.01); H01L 21/6715 (2013.01); H01L 21/68742 (2013.01)] 14 Claims
OG exemplary drawing
 
2. A coater with an automatic cleaning function, the coater comprising:
a coater chamber having a solution trough defined therein;
a first valve and a second valve in fluid communication with the solution trough, each of the first valve and the second valve controllable between a first position to enable filling up of the solution trough with a cleaning solution and a second position to enable draining of the cleaning solution from the solution trough;
a substrate chuck positioned within the coater chamber, the substrate chuck to hold and position a substrate at a distance relative to an inner bottom of the coater chamber;
a rotating actuator coupled to the substrate chuck and operable to rotate the substrate chuck relative to the coater chamber; and
an exhaust pipe fluidly connected to an exhaust port and a switch valve installed on the exhaust pipe to control venting of gas out of the coater chamber, wherein the exhaust pipe is in fluid communication with the solution trough to enable filling up of the exhaust pipe with the cleaning solution, wherein the exhaust pipe is disposed outside the coater chamber, and wherein the exhaust pipe extends upwardly along a side wall of the coater chamber to enable filling of the solution trough and the exhaust pipe to the same level with the cleaning solution.