CPC G03F 7/0005 (2013.01) [G02B 5/1857 (2013.01); G03F 7/0002 (2013.01)] | 20 Claims |
15. A method of imprinting a pattern on a substrate, the method comprising:
forming a first pattern on a plurality of die on each of a plurality of masters using a method other than imprinting, the first pattern on each die including a plurality of patterned features;
measuring the patterned features at a plurality of locations on each die on each of the masters;
selecting a first die on a first master of the plurality of masters based on the measurements of the patterned features on each die of each of the masters;
using the first die on the first master to form a second pattern on a first imprint template;
imprinting the first pattern on each die of a plurality of die of a new master with the first imprint template; and
using the plurality of die on the new master to form the second pattern on each die of a plurality of die on a second imprint template.
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