US 12,111,570 B2
Shaping system with cutouts in an optical diaphragm and method of use
Teresa Perez Estrada, Pflugerville, TX (US)
Assigned to Canon Kabushiki Kaisha, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Mar. 29, 2021, as Appl. No. 17/215,630.
Prior Publication US 2022/0308445 A1, Sep. 29, 2022
Int. Cl. G03F 7/00 (2006.01); B29C 35/08 (2006.01); B29C 59/02 (2006.01); B82Y 40/00 (2011.01)
CPC G03F 7/0002 (2013.01) [B29C 35/0805 (2013.01); B29C 59/022 (2013.01); B29C 2035/0827 (2013.01); B82Y 40/00 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A shaping system comprising:
a radiation source;
a template chuck configured to hold a template;
an optical diaphragm positioned between the template chuck and the radiation source; and
the optical diaphragm has a plurality of blades, each blade having a cutout in an edge of the each blade,
wherein each blade has two cutouts with a cutout width that are separated from each other by a cutout separation distance;
wherein a cutout fraction is a cutout width divided by cutout separation distance; and
wherein the cutout fraction is between 0.1-0.2,
wherein edges and cutouts of the plurality of blades form an opening which actinic radiation from the radiation source passes through.