US 12,111,555 B2
Method of manufacturing active matrix substrate and liquid crystal display device
Katsunori Misaki, Kameyama (JP)
Assigned to Sharp Display Technology Corporation, Kameyama (JP)
Filed by Sharp Display Technology Corporation, Kameyama (JP)
Filed on Apr. 18, 2023, as Appl. No. 18/136,275.
Claims priority of application No. 2022-078327 (JP), filed on May 11, 2022.
Prior Publication US 2023/0367166 A1, Nov. 16, 2023
Int. Cl. G02F 1/1368 (2006.01); G02F 1/1362 (2006.01)
CPC G02F 1/1368 (2013.01) [G02F 1/136209 (2013.01); G02F 1/136222 (2021.01); G02F 1/136227 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A method of manufacturing an active matrix substrate, the method comprising:
forming a plurality of thin film transistors corresponding to a plurality of subpixels on a base substrate;
forming color filters provided with colored layers having predetermined colors disposed on the plurality of thin film transistors opposite the base substrate, respectively, the color filters having contact holes for electrical connection to the plurality of thin film transistors, respectively;
forming a first transparent electrode by forming a first transparent conductive film above the color filters opposite the base substrate and patterning the first transparent conductive film;
forming an inorganic protection film made of an inorganic insulating film on the first transparent electrodes opposite the base substrate;
forming a second transparent conductive film on the inorganic protection film opposite the base substrate;
forming antireflection layers on the second transparent conductive film opposite the base substrate, each of the antireflection layers formed by layering a metal layer and an inorganic insulating layer, and overlapping a boundary portion between the colored layers; and
forming a second transparent electrode by patterning the second transparent conductive film,
wherein in forming the second transparent electrode, the second transparent electrode is provided between the inorganic protection film and the antireflection layers.
 
7. A liquid crystal display device comprising:
an active matrix substrate provided with a plurality of thin film transistors corresponding to a plurality of subpixels;
a counter substrate facing the active matrix substrate; and
a liquid crystal layer provided between the active matrix substrate and the counter substrate,
wherein the active matrix substrate includes:
color filters with colored layers having predetermined colors disposed on the plurality of thin film transistors, respectively,
antireflection layers overlapping boundary portions of the colored layers, each of the antireflection layers including a metal layer and an inorganic insulating layer layered,
a first transparent electrode, a second transparent electrode, and a third transparent electrode provided above the color filters in a stated order in which the first transparent electrode, the second transparent electrode, and the third transparent electrode are increasingly separated from the color filters, and
an inorganic protection film made of an inorganic insulating film provided between the first transparent electrode and the second transparent electrode,
the antireflection layers are provided on the second transparent electrode,
the third transparent electrode is in contact with the second transparent electrode at least in the plurality of subpixels, and
the second transparent electrode is provided between the inorganic protection film and the antireflection layers.