CPC G02B 6/13 (2013.01) [B25J 15/0028 (2013.01); B25J 15/0616 (2013.01); H01L 24/83 (2013.01); H01L 2224/83121 (2013.01); H01L 2224/83855 (2013.01); H01L 2924/3511 (2013.01)] | 6 Claims |
1. A method for applying stress compensation for aligning a companion chip with a host chip, the method comprising:
performing an active alignment to finely align the companion chip with the host chip by
receiving a feedback from the host chip on whether the companion chip is optically aligned with the host chip, and
activating a pick-up tool to apply a stress compensation force to the companion chip to adjust a curvature of the companion chip until the companion chip is optically aligned with the host chip; and
when the companion chip is optically aligned with the host chip, curing an adhesive to affix the companion chip to the host chip while the pick-up tool is actively applying the stress compensation force to the companion chip.
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