US 12,111,434 B2
MEMS-based rotation sensor for seismic applications and sensor units having same
Maxime Projetti, Gif-sur-Yvette (FR); Olivier Vancauwenberghe, Le Pecq (FR); Nicolas Goujon, Oslo (NO); and Hans Paulson, Horten (NO)
Assigned to SCHLUMBERGER TECHNOLOGY CORPORATION, Sugar Land, TX (US)
Filed by Schlumberger Technology Corporation, Sugar Land, TX (US)
Filed on Oct. 27, 2022, as Appl. No. 18/050,248.
Application 16/657,563 is a division of application No. 15/407,241, filed on Jan. 16, 2017, granted, now 10,451,753, issued on Oct. 22, 2019.
Application 15/407,241 is a division of application No. 14/104,806, filed on Dec. 12, 2013, granted, now 9,547,095, issued on Jan. 17, 2017.
Application 18/050,248 is a continuation of application No. 16/657,563, filed on Oct. 18, 2019, granted, now 11,487,031.
Claims priority of provisional application 61/739,602, filed on Dec. 19, 2012.
Prior Publication US 2023/0070241 A1, Mar. 9, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G01V 1/16 (2006.01); G01P 15/125 (2006.01); G01V 1/00 (2006.01); G01V 1/18 (2006.01); G01V 1/38 (2006.01); G01C 19/5712 (2012.01)
CPC G01V 1/164 (2013.01) [G01P 15/125 (2013.01); G01V 1/003 (2013.01); G01V 1/18 (2013.01); G01V 1/3808 (2013.01); G01C 19/5712 (2013.01); G01V 1/189 (2013.01); G01V 1/38 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A seismic data acquisition system, comprising:
one or more sources configured to generate seismic waves; and
one or more sensor units configured to record seismic waves generated by the one or more sources, the one or more sensor units comprising a first seismic sensor configured to measure a vertical wavefield of the seismic waves, and a second seismic sensor configured to measure a gradient of the vertical wavefield, wherein the second seismic sensor comprises:
an anchor disposed on a substrate;
a proof mass coupled to the anchor via a plurality of flexural springs, the proof mass having a first electrode adapted to move with the proof mass; and
a second electrode disposed on the substrate, one of the first and second electrodes being configured to generate an electrical signal having an amplitude corresponding with a degree of angular movement of the first electrode relative to the second electrode or the second electrode relative to the first electrode.