US 12,111,427 B2
Ultrasonic detection device
Shyh-Bin Kuo, Hsinchu (TW); and Tai-Hsiang Huang, Hsinchu (TW)
Assigned to Au Optronics Corporation, Hsinchu (TW)
Filed by Au Optronics Corporation, Hsinchu (TW)
Filed on Aug. 19, 2021, as Appl. No. 17/406,119.
Claims priority of application No. 110118442 (TW), filed on May 21, 2021.
Prior Publication US 2022/0373664 A1, Nov. 24, 2022
Int. Cl. G01S 7/52 (2006.01); B06B 1/02 (2006.01); G01S 15/89 (2006.01)
CPC G01S 7/5205 (2013.01) [B06B 1/0292 (2013.01); G01S 7/52004 (2013.01); G01S 15/8925 (2013.01)] 18 Claims
OG exemplary drawing
 
1. An ultrasonic detection device, comprising:
a substrate;
a plurality of sensing elements, a plurality of first test elements, and a plurality of first dummy elements, located on the substrate, wherein the first test elements are located between the sensing elements and the first dummy elements, and each of the sensing elements, the first test elements, and the first dummy elements comprises an array of capacitive microelectromechanical ultrasonic transducers, wherein the sensing elements are located between the first test elements, wherein the sensing elements and the first test elements are located between the first dummy elements;
at least one first common signal line, electrically connected to the sensing elements and the first test elements;
a plurality of sensing signal lines, electrically connected to the sensing elements; and
at least one test signal line, electrically connected to the first test elements.