US 12,111,343 B2
Coaxial probe
Yukang Feng, St. Paul, MN (US); Jason Mroczkowski, St. Paul, MN (US); and Marty Cavegn, St. Paul, MN (US)
Assigned to Xcerra Corporation, Norwood, MA (US)
Filed by XCERRA CORPORATION, Norwood, MA (US)
Filed on Aug. 10, 2020, as Appl. No. 16/989,406.
Prior Publication US 2022/0043029 A1, Feb. 10, 2022
Int. Cl. G01R 3/00 (2006.01); G01R 1/067 (2006.01); G01R 1/073 (2006.01); G01R 31/28 (2006.01); H01L 21/66 (2006.01)
CPC G01R 3/00 (2013.01) [G01R 1/06772 (2013.01); G01R 1/07307 (2013.01); G01R 1/07342 (2013.01); G01R 31/2889 (2013.01); H01L 22/14 (2013.01); H01L 2924/00 (2013.01); H01L 2924/00014 (2013.01); H01L 2924/3011 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An apparatus comprising:
a radio-frequency signal probe comprising a first contact structure configured to contact a device under test at a first side and a second contact structure configured to contact a test circuit at a second side opposite the first side; and
a plurality of dielectric sleeves surrounding the radio-frequency signal probe, wherein the dielectric sleeves are separated from each other along a length of the radio frequency signal probe, the length of the radio frequency signal probe extending between the first and second sides.