US 12,111,341 B2
In-situ electric field detection method and apparatus
Yue Guo, Redwood City, CA (US); Yang Yang, San Diego, CA (US); Kartik Ramaswamy, San Jose, CA (US); Fernando Silveira, Santa Clara, CA (US); and A N M Wasekul Azad, Santa Clara, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Oct. 5, 2022, as Appl. No. 17/960,666.
Prior Publication US 2024/0118328 A1, Apr. 11, 2024
Int. Cl. G01R 29/08 (2006.01)
CPC G01R 29/0885 (2013.01) 12 Claims
OG exemplary drawing
 
1. An electric field measurement system, comprising:
a first light source configured to transmit electromagnetic energy at one or more wavelengths;
a first light sensor configured to receive the electromagnetic energy transmitted at the one or more wavelengths;
an array of electro-optic sensors positioned on a surface of a substrate that is configured to be positioned on a substrate support in a processing chamber during a process performed in the processing chamber, the array of electro-optic sensors comprising:
at least one electro-optic sensor, comprising:
a package comprising a body;
a first electro-optic crystal disposed within the body; and
at least one optical fiber configured to:
transmit the electromagnetic energy transmitted from the first light source to a surface of the first electro-optic crystal; and
transmit at least a portion of the electromagnetic energy that was transmitted to the surface of the first electro-optic crystal and subsequently passed through at least a portion of the first electro-optic crystal to the first light sensor, wherein the first light sensor is configured to generate a signal that varies based on an attribute of the portion of the electromagnetic energy received by the first light sensor from the at least one optical fiber; and
a controller configured to receive the generated signal from the first light sensor and generate a command signal based on the received signal.