US 12,111,284 B2
Gas sensors with negligible response to humidity and temperature
Niharika Gupta, Berkeley, CA (US); Ali Javey, Lafayette, CA (US); and Hossain Mohammad Fahad, Berkley, CA (US)
Assigned to The Regents of the University of California, Oakland, CA (US)
Appl. No. 17/594,605
Filed by The Regents of the University of California, Oakland, CA (US)
PCT Filed Apr. 23, 2020, PCT No. PCT/US2020/029632
§ 371(c)(1), (2) Date Oct. 22, 2021,
PCT Pub. No. WO2020/219758, PCT Pub. Date Oct. 29, 2020.
Claims priority of provisional application 62/837,839, filed on Apr. 24, 2019.
Prior Publication US 2022/0205947 A1, Jun. 30, 2022
Int. Cl. G01N 27/403 (2006.01); G01N 27/414 (2006.01); G01N 33/00 (2006.01)
CPC G01N 27/4141 (2013.01) [G01N 27/4146 (2013.01); G01N 33/0037 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A gas sensor, comprising:
a substrate;
an isolation region formed on outer edges of the substrate;
a micro-heater formed on the isolation region;
a sensing layer formed on the substrate inside of the isolation region; and
a source and drain formed around the sensing layer and inside of the isolation region.