CPC G01N 21/8806 (2013.01) [G01B 9/02094 (2013.01); G01N 29/2418 (2013.01); G01N 2021/8838 (2013.01); G01N 2201/06113 (2013.01); G01N 2201/0635 (2013.01)] | 2 Claims |
1. A vibration measurement device comprising:
an excitation unit configured to excite an elastic wave to an inspection target;
an illumination unit configured to perform stroboscopic illumination to a measurement region of a surface of the inspection target using a wavelength stabilized laser beam source provided with a volume holographic grating, the volume holographic grating being configured to selectively return light of a narrower wavelength band than a wavelength band of an oscillation laser beam from a semiconductor laser to the semiconductor laser; and
a displacement measurement unit configured to collectively measure a displacement of each point of the measurement region in a back-and-forth direction by speckle sharing interferometry in at least three mutually different phases of the elastic wave by controlling a phase of the elastic wave and timing of the stroboscopic illumination,
wherein the displacement measurement unit is set such that an optical path difference between two light beams which are reflected from two points on the surface of the inspection target in the measurement region and interfere with each other by the speckle sharing interferometry is shorter than a coherence length of a laser beam output from the wavelength stabilized laser beam source over the entire measurement region.
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