US 12,111,264 B2
Sample preparation method and sample preparing apparatus
Ichiro Sase, Yokohama (JP)
Assigned to NIKON CORPORATION, Tokyo (JP)
Filed by NIKON CORPORATION, Tokyo (JP)
Filed on Apr. 15, 2021, as Appl. No. 17/231,662.
Application 17/231,662 is a division of application No. 16/105,092, filed on Aug. 20, 2018, granted, now 10,996,147.
Application 16/105,092 is a continuation of application No. PCT/JP2016/054966, filed on Feb. 19, 2016.
Prior Publication US 2021/0231541 A1, Jul. 29, 2021
Int. Cl. G01N 21/64 (2006.01); C12M 1/12 (2006.01); G01N 1/30 (2006.01); G01N 1/31 (2006.01); G01N 1/42 (2006.01); G01N 1/44 (2006.01); G01N 23/225 (2018.01); G02B 21/00 (2006.01); G02B 21/06 (2006.01); G02B 21/36 (2006.01); H01J 37/20 (2006.01); G01N 23/04 (2018.01)
CPC G01N 21/6458 (2013.01) [C12M 25/00 (2013.01); G01N 1/30 (2013.01); G01N 1/31 (2013.01); G01N 1/42 (2013.01); G01N 1/44 (2013.01); G01N 21/6428 (2013.01); G01N 21/6452 (2013.01); G01N 21/6456 (2013.01); G01N 23/225 (2013.01); G02B 21/008 (2013.01); G02B 21/0088 (2013.01); G02B 21/06 (2013.01); G02B 21/361 (2013.01); H01J 37/20 (2013.01); G01N 23/04 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A sample preparing apparatus comprising:
a light radiating unit, including a lens, that irradiates a first region of a sample with light at a time t1 and irradiates a second region different from the first region with light at a time t2 after the time t1;
a fixing unit, including a valve, that fixes the sample at a time t3 after the time t2; and
a computer that automatically sets the first region and the second region in response to a first input by a user indicating a number of regions to be irradiated with light, and automatically sets the time t2 and the time t3 in response to a second input by the user indicating an irradiation interval of time.