CPC G01L 19/148 (2013.01) [G01L 1/148 (2013.01); G01L 1/16 (2013.01)] | 13 Claims |
1. A method of manufacturing a pressure sensor, the method comprising:
preparing a base substrate including an embossed pattern;
forming a first conductive layer on the base substrate, wherein the first conductive layer has a curved surface corresponding to the embossed pattern;
fixing the base substrate including the first conductive layer to an omnidirectional stretching device and then planarizing the curved surface of the first conductive layer by applying a tensile force to the base substrate in all directions;
forming a pressure sensitive material layer on the first conductive layer having the planarized surface, wherein the pressure sensitive material includes a dielectric and nanoparticles dispersed in the dielectric; and
forming a second conductive layer on the pressure sensitive material layer,
where the dielectric and the nanoparticle include materials having pyroelectricities of polarities opposite to each other.
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