US 12,111,219 B2
Pressure sensor, manufacturing method thereof, and display device having the same
Jae Ik Lim, Yongin-si (KR); Won Sang Park, Yongin-si (KR); Hye Yong Chu, Yongin-si (KR); Do-Il Kim, Suwon-si (KR); Nae-Eung Lee, Seoul (KR); and Han-Byeol Lee, Suwon-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-Si (KR)
Filed by Samsung Display Co., Ltd., Yongin-Si (KR); and RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY, Suwon-si (KR)
Filed on Feb. 1, 2023, as Appl. No. 18/104,672.
Application 18/104,672 is a division of application No. 16/178,469, filed on Nov. 1, 2018, granted, now 11,598,687.
Claims priority of application No. 10-2017-0155067 (KR), filed on Nov. 20, 2017.
Prior Publication US 2023/0175911 A1, Jun. 8, 2023
Int. Cl. G01L 1/14 (2006.01); G01L 1/16 (2006.01); G01L 19/14 (2006.01)
CPC G01L 19/148 (2013.01) [G01L 1/148 (2013.01); G01L 1/16 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A method of manufacturing a pressure sensor, the method comprising:
preparing a base substrate including an embossed pattern;
forming a first conductive layer on the base substrate, wherein the first conductive layer has a curved surface corresponding to the embossed pattern;
fixing the base substrate including the first conductive layer to an omnidirectional stretching device and then planarizing the curved surface of the first conductive layer by applying a tensile force to the base substrate in all directions;
forming a pressure sensitive material layer on the first conductive layer having the planarized surface, wherein the pressure sensitive material includes a dielectric and nanoparticles dispersed in the dielectric; and
forming a second conductive layer on the pressure sensitive material layer,
where the dielectric and the nanoparticle include materials having pyroelectricities of polarities opposite to each other.