US 12,111,110 B2
Heat exchanger with multistaged cooling
Manoj A. Gajendra, Bangalore (IN)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Feb. 24, 2022, as Appl. No. 17/679,824.
Application 17/679,824 is a division of application No. 16/668,447, filed on Oct. 30, 2019, granted, now 11,306,971.
Claims priority of provisional application 62/779,385, filed on Dec. 13, 2018.
Prior Publication US 2022/0178617 A1, Jun. 9, 2022
Int. Cl. F28D 1/02 (2006.01); F28F 9/00 (2006.01); B01D 5/00 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01)
CPC F28D 1/0246 (2013.01) [F28F 9/002 (2013.01); B01D 5/0003 (2013.01); B01D 5/0045 (2013.01); F28D 2001/0266 (2013.01); F28D 2001/0273 (2013.01); H01J 37/32844 (2013.01); H01L 21/67017 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A heat exchanger configured to exchange heat with a flowing effluent, comprising:
a coolant inlet;
a coolant outlet; and
a heat exchanging region disposed between the coolant inlet and the coolant outlet, the heat exchanging region comprising:
an outer wall enclosing an internal region of the heat exchanger that has a central axis;
a central channel region extending through the internal region, wherein a central channel is formed within the central channel region and is in fluid communication with the coolant inlet; and
a plurality of radial channel regions that each have a radial channel extending therethrough, each radial channel region comprising a heat exchanging surface configured to cool the flowing effluent, wherein the radial channel of each of the radial channel regions is in fluid communication with the central channel of the central channel region and the coolant outlet, wherein an angle of a tangent formed at any point on the heat exchanging surface of each of the plurality of channel regions relative to the central axis is less than or equal to 70 degrees.