| CPC F16F 15/02 (2013.01) | 19 Claims |
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1. A vibration isolation table for semiconductor equipment, the vibration isolation table comprising:
a lower structure comprising a plurality of block structures that are elongated in a first direction;
a middle structure on the lower structure; and
an upper structure on the middle structure,
wherein the plurality of block structures are spaced apart from one another in a second direction perpendicular to the first direction such that a space is formed between adjacent ones of the plurality of block structures,
wherein at least one of the lower structure and the upper structure comprises high attenuation concrete,
wherein the high attenuation concrete comprises a polymer and concrete,
wherein the high attenuation concrete has a higher vibration attenuation than the concrete, and
wherein the lower structure has a length in the first direction greater than a length of the upper structure in the first direction.
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