CPC C30B 25/12 (2013.01) [C30B 25/10 (2013.01); C30B 25/14 (2013.01); C30B 29/02 (2013.01)] | 20 Claims |
1. A method of making 2D material comprising:
providing a reaction chamber including:
a gas confining space extending through the reaction chamber from a chamber entrance to a chamber exit, the chamber entrance and chamber exit being open to a surrounding atmosphere,
a support extending through the gas confining space of the reaction chamber from the chamber entrance to the chamber exit, and
a plurality of carriers positioned on the support, each of the plurality of carriers including a forming layer suitable for producing 2D material disposed on a surface of the carrier,
introducing one or more purge gases into the gas confining space to purge the gas confining space of oxygen;
introducing a donor gas into the purged gas confining space;
moving the plurality of carriers along the support through the gas confining space from the chamber entrance and through the chamber exit while the chamber entrance and chamber exit are open to the surrounding atmosphere and the donor gas is being introduced into the gas confining space;
maintaining a positive pressure relative to the surrounding atmosphere throughout the gas confining space during the moving step; and
heating the forming layers to a temperature sufficient to produce 2D material as the plurality of carriers are moved through the gas confining space.
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