US 12,110,608 B2
Apparatus of oxidation-combusting an ingot grower and method thereof
Jung Ryul Kim, Gumi-si (KR)
Assigned to SK SILTRON CO., LTD., Gumi-si (KR)
Filed by SK SILTRON CO., LTD., Gumi-si (KR)
Filed on Apr. 20, 2021, as Appl. No. 17/235,809.
Claims priority of application No. 10-2021-0010820 (KR), filed on Jan. 26, 2021.
Prior Publication US 2022/0235485 A1, Jul. 28, 2022
Int. Cl. C30B 15/04 (2006.01); B01D 46/44 (2006.01); B01D 46/48 (2006.01); B08B 7/00 (2006.01); C30B 15/00 (2006.01)
CPC C30B 15/04 (2013.01) [B01D 46/448 (2013.01); B01D 46/48 (2013.01); B08B 7/0007 (2013.01); C30B 15/00 (2013.01); B01D 2273/10 (2013.01); B01D 2273/30 (2013.01); B01D 2279/35 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A method of oxidation-combusting an ingot grower comprising a chamber, an exhaust pipe connected to the chamber, and a filter housing connected to the exhaust pipe, the method comprising:
a) blocking flow between the filter housing and the exhaust pipe;
b) forming a vacuum state in the filter housing;
c) injecting air into the filter housing through an injection pipe connected to a first side of the filter housing to combust deposits of the filter housing;
repeating the steps b) and c);
measuring the temperature of the filter housing; and
forming a circulation structure in which the air flows to the injection pipe, the filter housing, and the exhaust pipe connected to a second side of the filter housing when the measured temperature of the filter housing is greater than a predetermined temperature.