US 12,110,592 B2
Generating metal-oxide film
Wyatt Thornley, Kennewick, WA (US); Linda Karin Sundberg, Los Gatos, CA (US); Krystelle Lionti, San Jose, CA (US); and Daniel Paul Sanders, San Jose, CA (US)
Assigned to International Business Machines Corporation, Armonk, NY (US)
Filed by International Business Machines Corporation, Armonk, NY (US)
Filed on Sep. 18, 2020, as Appl. No. 17/024,870.
Prior Publication US 2022/0090265 A1, Mar. 24, 2022
Int. Cl. C23C 18/12 (2006.01); C09D 1/00 (2006.01); C09D 7/20 (2018.01)
CPC C23C 18/1216 (2013.01) [C09D 1/00 (2013.01); C09D 7/20 (2018.01)] 20 Claims
 
1. A method comprising:
providing a metal ligand complex comprising a metal, oxygen, and a reactive moiety, wherein the metal ligand complex is dissolved in a solvent that coats at least part of a substrate; and
inducing a combustion process, wherein the metal ligand complex provides the oxygen to fuel the combustion process, in absence of an additional fuel, to generate a film that is formed over the at least part of the substrate, wherein the film comprises an oxide of the metal, wherein no additional components including fuels, oxidizers or adhesion promoters are used to form the film by combustion.