US 12,110,588 B2
Adjustable fluid inlet assembly for a substrate processing apparatus and method
Timo Malinen, Espoo (FI); Väinö Kilpi, Masala (FI); and Marko Pudas, Masala (FI)
Assigned to Picosun Oy, Espoo (FI)
Filed by Picosun Oy, Espoo (FI)
Filed on Nov. 21, 2022, as Appl. No. 17/991,611.
Application 17/991,611 is a continuation of application No. 16/622,070, granted, now 11,505,864, previously published as PCT/FI2017/050465, filed on Jun. 21, 2017.
Prior Publication US 2023/0090809 A1, Mar. 23, 2023
Int. Cl. C23C 16/455 (2006.01); B01J 3/02 (2006.01); B01J 3/03 (2006.01); C30B 25/14 (2006.01); H01L 21/67 (2006.01)
CPC C23C 16/45544 (2013.01) [B01J 3/02 (2013.01); B01J 3/03 (2013.01); C23C 16/45561 (2013.01); C23C 16/45563 (2013.01); C30B 25/14 (2013.01); H01L 21/67017 (2013.01); H01L 21/67126 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A fluid inlet assembly for a substrate processing apparatus, comprising:
a fluid inlet pipe configured to pass through a wall of a sealed pressure vessel;
a resilient element around the fluid inlet pipe outside the sealed pressure vessel, coupling the fluid inlet pipe to the wall; and
first and second end parts of the fluid inlet assembly, the resilient element being coupled therebetween,
where the fluid inlet pipe is formed of two pipes arranged to slide inside each other.