US 12,109,409 B2
Micro probe array device and manufacturing method of the device
Jae-Hyoung Park, Gyeonggi-do (KR); Seung-Ki Lee, Seoul (KR); Donggen Choi, Gyeonggi-do (KR); So-Bin Shin, Gyeonggi-do (KR); and Ji-Yeon Kim, Gyeonggi-do (KR)
Assigned to Industry-Academic Cooperation Foundation, Dankook University, Gyeonggi-do (KR)
Filed by Industry-Academic Cooperation Foundation, Dankook University, Gyeonggi-do (KR)
Filed on Sep. 4, 2020, as Appl. No. 17/012,304.
Claims priority of application No. 10-2020-0039689 (KR), filed on Apr. 1, 2020; application No. 10-2020-0039699 (KR), filed on Apr. 1, 2020; application No. 10-2020-0068984 (KR), filed on Jun. 8, 2020; application No. 10-2020-0112718 (KR), filed on Sep. 4, 2020; application No. 10-2020-0112720 (KR), filed on Sep. 4, 2020; and application No. 10-2020-0112723 (KR), filed on Sep. 4, 2020.
Prior Publication US 2021/0311092 A1, Oct. 7, 2021
Int. Cl. A61N 1/04 (2006.01); A61N 1/05 (2006.01); G01N 27/30 (2006.01); G01Q 70/06 (2010.01); G01Q 70/16 (2010.01)
CPC A61N 1/0543 (2013.01) [A61N 1/0476 (2013.01); G01N 27/30 (2013.01); G01Q 70/06 (2013.01); G01Q 70/16 (2013.01); A61B 2562/046 (2013.01); A61B 2562/125 (2013.01)] 35 Claims
OG exemplary drawing
 
1. A micro probe array device, comprising:
a substrate;
a via contact formed through the substrate;
a working electrode in the form of a probe formed on an upper end of the via contact;
a reference electrode formed at a lower end of the via contact and is configured to provide an electric signal flowing through the via contact to the working electrode;
an insulating layer formed on a portion of the working electrode,
wherein the working electrode is arranged in an array form, and at least one working electrode having different heights is included in the micro probe array device, and
a counter electrode disposed on the insulating layer which separates an electrical connection between the counter electrode and the working electrode in manner that when the working electrode and the counter electrode both are in contact with an object, electrical signal flows from the working electrode to the object and flows from the object to the counter electrode.