US 11,785,739 B2
System level control of mems-based cooling systems
Ganapathy Sankar, Cupertino, CA (US); Marc Mignard, Los Gatos, CA (US); Shekhar Halakatti, Campbell, CA (US); Suchitra Ramesh, San Jose, CA (US); Suryaprakash Ganti, Los Altos, CA (US); Seshagiri Rao Madhavapeddy, La Jolla, CA (US); and Prabhu Sathyamurthy, San Jose, CA (US)
Assigned to Frore Systems Inc., San Jose, CA (US)
Filed by Frore Systems Inc., San Jose, CA (US)
Filed on Sep. 13, 2021, as Appl. No. 17/473,774.
Claims priority of provisional application 63/079,923, filed on Sep. 17, 2020.
Prior Publication US 2022/0087058 A1, Mar. 17, 2022
Int. Cl. H05K 7/20 (2006.01)
CPC H05K 7/20172 (2013.01) 20 Claims
OG exemplary drawing
 
1. A system, comprising:
a plurality of cooling cells including a plurality of cooling elements configured to be actuated to induce vibrational motion to drive a fluid toward a heat-generating structure; and
a switching and control module coupled to the plurality of cooling elements and providing a plurality of drive signals to the plurality of cooling elements based on at least one drive signal input, each of the plurality of drive signals having a frequency corresponding to a cooling element of the plurality of cooling elements, the frequency corresponding to a resonant state of the cooling element.