US 11,784,083 B2
Pad structure for transferring flat panel
Jae Cheon Kwon, Suwon-si (KR)
Assigned to G-NONE.Co.Ltd., Suwon-si (KR)
Filed by G-NONE.Co.Ltd., Suwon-si (KR)
Filed on Aug. 18, 2021, as Appl. No. 17/405,528.
Claims priority of application No. 10-2020-0130746 (KR), filed on Oct. 11, 2020.
Prior Publication US 2022/0115258 A1, Apr. 14, 2022
Int. Cl. H01L 21/683 (2006.01); H01L 21/67 (2006.01); C09J 7/20 (2018.01); H01L 21/687 (2006.01)
CPC H01L 21/6836 (2013.01) [C09J 7/20 (2018.01); H01L 21/67294 (2013.01); C09J 2203/326 (2013.01); C09J 2301/31 (2020.08); C09J 2483/006 (2013.01); H01L 21/6875 (2013.01); H01L 21/68707 (2013.01); H01L 2221/68318 (2013.01); H01L 2221/68381 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A pad structure for transferring a flat panel comprising:
a pad for transferring a flat panel, the pad comprising a disk-shaped pad body having a diameter and height and a contact portion formed on the pad body and having an adhesive force suitable for holding the flat panel to be transferred and for enabling separation of the flat panel, wherein the flat panel is one of a semiconductor wafer and flat glass;
a first adhesive tape having a first surface including an adhesive layer, the first surface bonded to a bottom surface of the pad body; and
a second adhesive tape in a form of a double-sided tape comprising a first adhesive layer and a second adhesive layer on respective surfaces thereof, the first adhesive layer bonded to the first adhesive tape and the second adhesive layer configured to be bonded to a blade,
wherein the contact portion comprises:
a first adhesive pattern having a circular shape having a diameter in a center of a top surface of the pad body and continuously flush with the top surface of the pad body; and
a ciliated member having a circumferential surface surrounding the first adhesive force adjustment pattern on the top surface of the pad body, the ciliated member including a plurality of cilia spaced apart from one another to increase an adhesive force per unit area,
wherein the first adhesive pattern and the ciliated member have the same height from the top surface contacting the flat panel.