CPC H01L 21/67778 (2013.01) [H01L 21/67017 (2013.01); H01L 21/67109 (2013.01); H01L 21/67115 (2013.01); H01L 21/67126 (2013.01); H01L 21/67196 (2013.01); H01L 21/67201 (2013.01); H01L 21/67207 (2013.01); H01L 21/67248 (2013.01); H01L 21/67346 (2013.01); H01L 21/67739 (2013.01); H01L 21/67748 (2013.01); H01L 21/67751 (2013.01); H01L 21/68 (2013.01); H01L 21/68707 (2013.01); H01L 21/68735 (2013.01); H01L 21/68742 (2013.01); H01L 21/68757 (2013.01)] | 24 Claims |
1. A chamber, comprising:
a platen having a heat transfer element embedded therein;
a plurality of carrier holders positioned about the platen;
a plurality of support members extending from the plurality of carrier holders;
a carrier positioned on the support members of one of the plurality of carrier holders; and
a lift pin assembly, comprising:
a support plate,
a base housing coupled to the support plate,
a shaft made of a first material and comprising a depression formed in the shaft, the shaft at least partially disposed in the base housing,
a tip made of a second material and comprising a protruded portion fitted into the depression using an interference fit, wherein the second material is softer than the first material,
a gripping member disposed in the base housing, wherein an end of the shaft is coupled to the gripping member, and
a retainer housing disposed in the base housing and coupled to the support plate, wherein a lip of the gripping member is received in the retainer housing.
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