US 11,784,076 B2
Substrate transfer mechanism to reduce back-side substrate contact
Masato Ishii, Sunnyvale, CA (US); Richard O. Collins, Santa Clara, CA (US); Richard Giljum, Brentwood, CA (US); and Alexander Berger, Palo Alto, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jul. 15, 2022, as Appl. No. 17/866,152.
Application 17/866,152 is a division of application No. 16/899,043, filed on Jun. 11, 2020, granted, now 11,424,149.
Application 16/899,043 is a division of application No. 15/894,735, filed on Feb. 12, 2018, granted, now 10,755,955, issued on Aug. 25, 2020.
Prior Publication US 2022/0351999 A1, Nov. 3, 2022
Int. Cl. H01L 21/687 (2006.01); H01L 21/677 (2006.01); H01L 21/673 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01)
CPC H01L 21/67778 (2013.01) [H01L 21/67017 (2013.01); H01L 21/67109 (2013.01); H01L 21/67115 (2013.01); H01L 21/67126 (2013.01); H01L 21/67196 (2013.01); H01L 21/67201 (2013.01); H01L 21/67207 (2013.01); H01L 21/67248 (2013.01); H01L 21/67346 (2013.01); H01L 21/67739 (2013.01); H01L 21/67748 (2013.01); H01L 21/67751 (2013.01); H01L 21/68 (2013.01); H01L 21/68707 (2013.01); H01L 21/68735 (2013.01); H01L 21/68742 (2013.01); H01L 21/68757 (2013.01)] 24 Claims
OG exemplary drawing
 
1. A chamber, comprising:
a platen having a heat transfer element embedded therein;
a plurality of carrier holders positioned about the platen;
a plurality of support members extending from the plurality of carrier holders;
a carrier positioned on the support members of one of the plurality of carrier holders; and
a lift pin assembly, comprising:
a support plate,
a base housing coupled to the support plate,
a shaft made of a first material and comprising a depression formed in the shaft, the shaft at least partially disposed in the base housing,
a tip made of a second material and comprising a protruded portion fitted into the depression using an interference fit, wherein the second material is softer than the first material,
a gripping member disposed in the base housing, wherein an end of the shaft is coupled to the gripping member, and
a retainer housing disposed in the base housing and coupled to the support plate, wherein a lip of the gripping member is received in the retainer housing.