CPC H01L 21/67757 (2013.01) [C23C 16/4583 (2013.01); H01L 21/67346 (2013.01); H01L 21/68 (2013.01)] | 19 Claims |
1. A substrate support for supporting a plurality of substrates, comprising:
a plurality of substrate support elements having a ring shape and configured to support a plurality of substrates in a vertically spaced apart relation; and
and a guiding mechanism attached to the lift base to allow lift members movement relative to substrate support elements.
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