US 11,784,075 B2
Batch substrate support with warped substrate capability
Shashidhara Patel, Bangalore (IN); Ananthkrishna Jupudi, Singapore (SG); and Ribhu Gautam, Bengaluru (IN)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed on Apr. 12, 2021, as Appl. No. 17/227,442.
Application 17/227,442 is a continuation of application No. 16/198,417, filed on Nov. 21, 2018, granted, now 11,361,981.
Claims priority of provisional application 62/666,060, filed on May 2, 2018.
Prior Publication US 2021/0233790 A1, Jul. 29, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/67 (2006.01); H01L 21/677 (2006.01); C23C 16/458 (2006.01); H01L 21/68 (2006.01); H01L 21/673 (2006.01)
CPC H01L 21/67757 (2013.01) [C23C 16/4583 (2013.01); H01L 21/67346 (2013.01); H01L 21/68 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A substrate support for supporting a plurality of substrates, comprising:
a plurality of substrate support elements having a ring shape and configured to support a plurality of substrates in a vertically spaced apart relation; and
and a guiding mechanism attached to the lift base to allow lift members movement relative to substrate support elements.