| CPC G21K 5/08 (2013.01) [G21G 1/10 (2013.01)] | 9 Claims |
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1. A liquid target device comprising:
a liquid accommodation portion in which a target liquid is accommodated;
a beam passage through which a charged particle beam emitted from a particle accelerator passes to reach the liquid accommodation portion;
a target foil positioned at a downstream end of the beam passage, the target foil separating the beam passage and the liquid accommodation portion from each other;
a vacuum foil positioned at an upstream end of the beam passage, the vacuum foil separating a vacuum region provided upstream of the beam passage and the beam passage from each other; and
an intermediate foil positioned in the beam passage between the target foil and the vacuum foil,
wherein the beam passage is divided by the intermediate foil into a first gas chamber comprising a first inlet into which a cooling gas is supplied at a position between the vacuum foil and the intermediate foil and a second gas chamber comprising a second inlet into which a cooling gas is supplied at a position between the intermediate foil and the target foil,
wherein the first gas chamber and the second gas chamber are separated from each other by the intermediate foil, and
wherein the liquid target device further comprises a pipe connected to the second gas chamber and configured to receive the cooling gas and the target liquid discharged from the second gas chamber, and a filter and a gas-liquid separation tank disposed in the pipe and configured to remove foreign substances and the target liquid from the cooling gas discharged from the second gas chamber and return the cooling gas to the second inlet.
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