CPC G03F 7/70508 (2013.01) [G03F 7/705 (2013.01); G03F 7/70633 (2013.01)] | 20 Claims |
1. A method for dividing a plurality of substrates into groups associated with group specific corrections for a lithographic apparatus, the method comprising:
obtaining pre-exposure data and post-exposure data associated with the plurality of substrates; and
clustering, by a hardware computer system, the substrates using separately the pre-exposure data and post-exposure data to obtain a first set of groups within the plurality of substrates associated with the pre-exposure data and a second set of groups within the plurality of substrates associated with the post-exposure data, wherein the clustering provides:
i) an optimized number of groups within the first set of groups and the second set of groups; and/or
ii) matching of the first set of groups with the second set of groups based on optimization of a matching metric.
|