US 11,782,208 B1
Wavelength-division-multiplexing filter stages with segmented wavelength splitters
Yusheng Bian, Ballston Lake, NY (US)
Assigned to GlobalFoundries U.S. Inc., Malta, NY (US)
Filed by GlobalFoundries U.S. Inc., Malta, NY (US)
Filed on Jul. 6, 2022, as Appl. No. 17/858,549.
Int. Cl. G02B 6/12 (2006.01); G02B 6/13 (2006.01); G02B 6/293 (2006.01)
CPC G02B 6/12007 (2013.01) [G02B 6/13 (2013.01); G02B 6/2938 (2013.01); G02B 6/29352 (2013.01); G02B 6/29325 (2013.01); G02B 2006/12061 (2013.01); G02B 2006/12097 (2013.01); G02B 2006/12164 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A structure for a wavelength splitter, the structure comprising:
a first waveguide core including a first section, a second section, and a phase delay line longitudinally between the first section and the second section, the phase delay line of the first waveguide core including a first delay section and a first plurality of segments longitudinally arranged in the first delay section; and
a second waveguide core including a first section, a second section, and a phase delay line longitudinally between the first section and the second section, the first section of the second waveguide core positioned adjacent to the first section of the first waveguide core to define a first directional coupler, and the second section of the second waveguide core positioned adjacent to the second section of the first waveguide core to define a second directional coupler,
wherein the first waveguide core and the second waveguide core comprise silicon nitride.