US 11,781,978 B2
Spectroscopic measurement device
Keiko Kato, Tokyo (JP); Hiroki Mashiko, Tokyo (JP); Katsuya Oguri, Tokyo (JP); and Hideki Goto, Tokyo (JP)
Assigned to Nippon Telegraph and Telephone Corporation, Tokyo (JP)
Appl. No. 17/633,881
Filed by Nippon Telegraph and Telephone Corporation, Tokyo (JP)
PCT Filed Aug. 28, 2019, PCT No. PCT/JP2019/033652
§ 371(c)(1), (2) Date Feb. 8, 2022,
PCT Pub. No. WO2021/038743, PCT Pub. Date Mar. 4, 2021.
Prior Publication US 2022/0276158 A1, Sep. 1, 2022
Int. Cl. G01N 21/3504 (2014.01); G01J 3/02 (2006.01); G01J 3/42 (2006.01)
CPC G01N 21/3504 (2013.01) [G01J 3/0208 (2013.01); G01J 2003/423 (2013.01); G01N 2201/06113 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A spectroscopic measurement apparatus comprising:
a pulsed laser light source configured to emit pulsed laser light;
a beam splitter configured to split the pulsed laser light into first light and second light;
a delay circuit configured to change a delay time of the first light with respect to the second light;
a chopper configured to intensity-modulate the first light;
a wavelength converter configured to wavelength-convert the second light into vacuum ultraviolet light;
an optical system configured to guide the first light that is intensity-modulated and the second light that is wavelength-converted to a sample to be measured, wherein the sample is disposed in a vacuum chamber, and wherein a concave mirror of the optical system is disposed in the vacuum chamber and is configured to guide the first light and the second light to the sample; and
a detector configured to detect the second light reflected by the sample or the second light transmitted through the sample.