CPC G01N 21/3504 (2013.01) [G01J 3/0208 (2013.01); G01J 2003/423 (2013.01); G01N 2201/06113 (2013.01)] | 12 Claims |
1. A spectroscopic measurement apparatus comprising:
a pulsed laser light source configured to emit pulsed laser light;
a beam splitter configured to split the pulsed laser light into first light and second light;
a delay circuit configured to change a delay time of the first light with respect to the second light;
a chopper configured to intensity-modulate the first light;
a wavelength converter configured to wavelength-convert the second light into vacuum ultraviolet light;
an optical system configured to guide the first light that is intensity-modulated and the second light that is wavelength-converted to a sample to be measured, wherein the sample is disposed in a vacuum chamber, and wherein a concave mirror of the optical system is disposed in the vacuum chamber and is configured to guide the first light and the second light to the sample; and
a detector configured to detect the second light reflected by the sample or the second light transmitted through the sample.
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