US 11,781,213 B2
Apparatus and method for vacuum deposition
Sergio Pace, Jodoigne (BE); Eric Silberberg, Haltinne (BE); Dimitri Wilders, Neupre (BE); Rémy Bonnemann, Saint-Nicolas (BE); and Lucie Gaouyat, Angleur (BE)
Assigned to ArcelorMittal, Luxembourg (LU)
Filed by Arcelor Mittal, Luxembourg (LU)
Filed on Apr. 1, 2022, as Appl. No. 17/711,260.
Application 17/711,260 is a division of application No. 16/318,563, granted, now 11,319,626, previously published as PCT/IB2017/000876, filed on Jul. 27, 2017.
Claims priority of application No. PCT/IB2016/054477 (WO), filed on Jul. 27, 2016.
Prior Publication US 2022/0228252 A1, Jul. 21, 2022
Int. Cl. C23C 14/24 (2006.01); C23C 14/02 (2006.01); C23C 14/14 (2006.01); C23C 14/56 (2006.01)
CPC C23C 14/246 (2013.01) [C23C 14/021 (2013.01); C23C 14/14 (2013.01); C23C 14/562 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A vacuum deposition facility for continuously depositing, on a running substrate, a coating formed from a metal alloy having a main element and at least one additional element, the vacuum deposition facility comprising:
a vacuum deposition chamber;
a substrate running through the vacuum deposition chamber;
a vapor jet coater;
an evaporation crucible for feeding the vapor jet coater with a vapor, the vapor including the main element and the at least one additional element;
a recharging furnace for feeding the evaporation crucible with the main element in a molten state and capable of maintaining a constant level of liquid in the evaporation crucible; and
a feeding unit for being fed with the at least one additional element in a solid state and for feeding the evaporation crucible with the at least one additional element in either the molten state, solid state, or a partially solid state;
the evaporation crucible receiving the at least one additional element from the feeding unit in said molten state, said solid state, or said partially solid state.