CPC C23C 14/246 (2013.01) [C23C 14/021 (2013.01); C23C 14/14 (2013.01); C23C 14/562 (2013.01)] | 19 Claims |
1. A vacuum deposition facility for continuously depositing, on a running substrate, a coating formed from a metal alloy having a main element and at least one additional element, the vacuum deposition facility comprising:
a vacuum deposition chamber;
a substrate running through the vacuum deposition chamber;
a vapor jet coater;
an evaporation crucible for feeding the vapor jet coater with a vapor, the vapor including the main element and the at least one additional element;
a recharging furnace for feeding the evaporation crucible with the main element in a molten state and capable of maintaining a constant level of liquid in the evaporation crucible; and
a feeding unit for being fed with the at least one additional element in a solid state and for feeding the evaporation crucible with the at least one additional element in either the molten state, solid state, or a partially solid state;
the evaporation crucible receiving the at least one additional element from the feeding unit in said molten state, said solid state, or said partially solid state.
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