US 11,779,866 B2
Modular filter manifold
Barry L. Gregerson, Deephaven, MN (US)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Filed by ENTEGRIS, INC., Billerica, MA (US)
Filed on Apr. 16, 2021, as Appl. No. 17/232,780.
Claims priority of provisional application 63/016,341, filed on Apr. 28, 2020.
Prior Publication US 2021/0331104 A1, Oct. 28, 2021
Int. Cl. B01D 35/30 (2006.01)
CPC B01D 35/306 (2013.01) [B01D 2201/302 (2013.01); B01D 2201/304 (2013.01); B01D 2201/4076 (2013.01); B01D 2201/4092 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A filter manifold, comprising:
at least one manifold plate, the manifold plate including:
a plate body having a first side and a second side, the second side opposite the first side;
at least two filter connections on the first side of the plate body, each filter connection including an outer wall and a divider; and
at least two fluid line connectors extending from the second side for each of the at least two filter connections, each of the fluid line connectors including a fluid passage passing through the manifold plate in a thickness direction of the plate body, each fluid passage including an opening at the first side that is located within the outer wall or the divider of one of the filter connections,
wherein for each filter connection, at least one of the openings at the first side is located within the divider and at least one of the openings at the first side is located between the divider and the outer wall, and
wherein each of the fluid passages of the fluid connectors being an independent path for fluid flow.