US 12,439,825 B2
Film structure, single crystal piezoelectric film and single crystal superconductor film
Takeshi Kijima, Ube (JP); and Akio Konishi, Ube (JP)
Assigned to I-PEX PIEZO SOLUTIONS INC., Yamaguchi (JP)
Appl. No. 17/436,294
Filed by I-PEX PIEZO SOLUTIONS INC., Yamaguchi (JP)
PCT Filed Dec. 27, 2019, PCT No. PCT/JP2019/051627
§ 371(c)(1), (2) Date Sep. 3, 2021,
PCT Pub. No. WO2020/179210, PCT Pub. Date Sep. 10, 2020.
Claims priority of application No. 2019-042068 (JP), filed on Mar. 7, 2019; application No. 2019-090505 (JP), filed on May 13, 2019; and application No. 2019-140723 (JP), filed on Jul. 31, 2019.
Prior Publication US 2022/0181541 A1, Jun. 9, 2022
Int. Cl. H01L 39/12 (2006.01); H01L 41/08 (2006.01); H01L 41/187 (2006.01); H10N 30/00 (2023.01); H10N 30/853 (2023.01); H10N 60/85 (2023.01)
CPC H10N 30/708 (2024.05) [H10N 30/853 (2023.02); H10N 30/8536 (2023.02); H10N 30/8542 (2023.02); H10N 30/8554 (2023.02); H10N 30/8561 (2023.02); H10N 60/857 (2023.02)] 20 Claims
OG exemplary drawing
 
1. A film structure comprising:
a substrate;
a buffer film formed on the substrate, having a tetragonal crystal structure containing zirconia, and including a film portion and a protruding portion;
a metal film containing a platinum group element and formed on the buffer film by means of epitaxial growth; and
a film containing Sr(Ti1-x, Rux)O3 (0≤x≤1) and formed on the metal film by means of epitaxial growth.