US 12,439,806 B2
Display apparatus with multilayer encapsulation layer and method of manufacturing the same
Chang Yeong Song, Suwon-si (KR); Won Jong Kim, Suwon-si (KR); Yi Su Kim, Seoul (KR); Jong Woo Kim, Hwaseong-si (KR); Hye In Yang, Siheung-si (KR); Woo Suk Jung, Yongin-si (KR); Yong Chan Ju, Yongin-si (KR); and Jae Heung Ha, Suwon-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Filed by Samsung Display Co., LTD., Yongin-si (KR)
Filed on Mar. 8, 2024, as Appl. No. 18/599,589.
Application 18/599,589 is a continuation of application No. 17/902,063, filed on Sep. 2, 2022, granted, now 11,963,386.
Application 17/902,063 is a continuation of application No. 16/991,542, filed on Aug. 12, 2020, granted, now 11,456,438, issued on Sep. 27, 2022.
Claims priority of application No. 10-2019-0144298 (KR), filed on Nov. 12, 2019.
Prior Publication US 2024/0215301 A1, Jun. 27, 2024
Int. Cl. H10K 59/80 (2023.01); H10K 50/844 (2023.01); H10K 71/00 (2023.01); H10K 102/00 (2023.01)
CPC H10K 59/8731 (2023.02) [H10K 50/844 (2023.02); H10K 71/00 (2023.02); H10K 2102/00 (2023.02)] 20 Claims
OG exemplary drawing
 
1. A display apparatus comprising:
a base substrate;
a light emitting structure disposed on the base substrate; and
a thin film encapsulation layer over the light emitting structure and the base substrate in a thickness direction, wherein
the thin film encapsulation layer includes:
a first inorganic layer; and
at least one organic layer disposed on the first inorganic layer,
the first inorganic layer includes:
a first-first density layer; and
a first-second density layer having a density lower than that of the first-first density layer and being in contact with the first-first density layer, and
each of the first-first density layer and the first-second density layer consists of a first chemical material including silicon and oxygen.