US 12,439,768 B2
Photoelectric conversion panel, X-ray imaging panel, and manufacturing method of photoelectric conversion panel
Hiroyuki Moriwaki, Kameyama (JP)
Assigned to Sharp Display Technology Corporation, Kameyama (JP)
Filed by Sharp Display Technology Corporation, Kameyama (JP)
Filed on Jan. 3, 2023, as Appl. No. 18/092,679.
Claims priority of application No. 2022-001335 (JP), filed on Jan. 6, 2022.
Prior Publication US 2023/0232643 A1, Jul. 20, 2023
Int. Cl. H10K 39/32 (2023.01); G01T 1/20 (2006.01); H10K 30/81 (2023.01); H10K 71/60 (2023.01)
CPC H10K 39/32 (2023.02) [G01T 1/20187 (2020.05); H10K 30/81 (2023.02); H10K 71/60 (2023.02)] 9 Claims
OG exemplary drawing
 
1. A photoelectric conversion panel comprising:
a substrate;
a thin film transistor disposed on the substrate;
a photoelectric conversion element disposed at an upper layer than the thin film transistor;
a first organic film formed at an upper layer than the photoelectric conversion element;
a first inorganic insulating film covering at least a part of the first organic film; and
a second organic film covering at least a part of the first inorganic insulating film,
wherein the first inorganic insulating film includes a first hole portion connecting the first organic film and the second organic film, and
a first moisture-proof portion at least a part of which is disposed at a side of the photoelectric conversion element with respect to the first hole portion, the first moisture-proof portion penetrating the first organic film.