| CPC H10H 20/857 (2025.01) [H01L 25/0753 (2013.01); H10H 20/814 (2025.01); H10H 20/8252 (2025.01); H10H 20/831 (2025.01); H10H 20/835 (2025.01); H10H 20/84 (2025.01); H10H 20/851 (2025.01); H10H 20/858 (2025.01); H10H 29/14 (2025.01); F21S 41/141 (2018.01); H10H 20/813 (2025.01); H10H 20/82 (2025.01); H10H 20/821 (2025.01); H10H 20/8312 (2025.01); H10H 20/841 (2025.01)] | 15 Claims |

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1. A light emitting diode, comprising:
a substrate;
a first conductivity type semiconductor layer disposed on the substrate;
a mesa comprising a second conductivity type semiconductor layer disposed on the first conductivity type semiconductor layer and an active layer interposed between the second conductivity type semiconductor layer and the first conductivity type semiconductor layer;
a first contact layer comprising an outer contact portion contacting the first conductivity type semiconductor layer near an edge of the first conductivity type semiconductor layer along a periphery of the mesa and an inner contact portion contacting the first conductivity type semiconductor layer in a region entirely surrounded by the mesa;
a second contact layer disposed on the mesa and contacting the second conductivity type semiconductor layer;
a first insulation layer covering the first conductivity type semiconductor layer and the mesa, and insulating the first contact layer from the mesa and the second contact layer,
wherein the first insulation layer exposes the first conductivity type semiconductor layer for the outer contact portion and the inner contact portion to contact the first conductivity type semiconductor layer,
wherein the first contact layer and the first insulation layer alternately contact the first conductivity type semiconductor layer in a direction along a periphery of the substrate,
wherein the first contact layer comprises a protrusion and a recess around the mesa, the protrusion of the first contact layer contacts the first conductivity type semiconductor layer, and the recess is disposed on the first insulation layer, and
wherein the protrusion and the recess are adjacent to each other in the direction along the periphery of the substrate in plan view.
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