US 12,439,742 B2
Light emitting device with electrode having specified molar ratio of magnesium to zinc
Yoshihiro Ueoka, Sodegaura (JP); Shigekazu Tomai, Sodegaura (JP); Satoshi Katsumata, Sodegaura (JP); Maki Kushimoto, Nagoya (JP); Manato Deki, Nagoya (JP); Yoshio Honda, Nagoya (JP); and Hiroshi Amano, Nagoya (JP)
Assigned to IDEMITSU KOSAN CO., LTD., Chiyoda-ku (JP); and NATIONAL UNIVERSITY CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH SYSTEM, Nagoya (JP)
Appl. No. 17/280,045
Filed by IDEMITSU KOSAN CO., LTD., Chiyoda-ku (JP); NATIONAL UNIVERSITY CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH SYSTEM, Nagoya (JP); and NIKKISO CO., LTD., Shibuya-ku (JP)
PCT Filed Sep. 26, 2019, PCT No. PCT/JP2019/037751
§ 371(c)(1), (2) Date Mar. 25, 2021,
PCT Pub. No. WO2020/067235, PCT Pub. Date Apr. 2, 2020.
Claims priority of application No. 2018-180754 (JP), filed on Sep. 26, 2018; and application No. 2019-042338 (JP), filed on Mar. 8, 2019.
Prior Publication US 2022/0037561 A1, Feb. 3, 2022
Int. Cl. H10H 20/833 (2025.01); C23C 14/08 (2006.01); C23C 14/34 (2006.01); H10H 20/01 (2025.01); H10H 20/825 (2025.01); H10H 20/857 (2025.01)
CPC H10H 20/833 (2025.01) [C23C 14/082 (2013.01); C23C 14/34 (2013.01); H10H 20/01 (2025.01); H10H 20/032 (2025.01); H10H 20/0364 (2025.01); H10H 20/825 (2025.01); H10H 20/857 (2025.01)] 19 Claims
OG exemplary drawing
 
1. A stacked body, comprising:
a semiconductor layer comprising a group III-V nitride semiconductor; and
an electrode layer comprising magnesium oxide and zinc oxide,
wherein the electrode layer has regions mainly composed of zinc oxide and regions mainly composed of magnesium oxide,
wherein the electrode layer has a molar ratio of magnesium based on a sum of magnesium and zinc, Mg/(Mg+Zn), in a range of from 0.25 to 0.75, and the electrode layer has a conductivity of 1.0×10−2 S/cm or more.