US 12,439,629 B2
Monolithic cascode multi-channel high electron mobility transistors
Yuhao Zhang, Blacksburg, VA (US); and Ming Xiao, Blacksburg, VA (US)
Assigned to VIRGINIA TECH INTELLECTUAL PROPERTIES, INC., Blacksburg, VA (US)
Filed by Virginia Tech Intellectual Properties, Inc., Blacksburg, VA (US)
Filed on Sep. 7, 2022, as Appl. No. 17/939,373.
Prior Publication US 2024/0079484 A1, Mar. 7, 2024
Int. Cl. H10D 30/47 (2025.01); H10D 62/85 (2025.01); H10D 84/01 (2025.01); H10D 84/84 (2025.01)
CPC H10D 30/475 (2025.01) [H10D 62/8503 (2025.01); H10D 84/01 (2025.01); H10D 84/84 (2025.01)] 18 Claims
OG exemplary drawing
 
2. A semiconductor device, comprising:
a first transistor with a first gate terminal, a first source terminal, and a first drain terminal, the first transistor being a depletion mode transistor and including a plurality of two-dimensional carrier channels of a conductivity type being one of a n-type or a p-type conductivity;
a second transistor with a second gate terminal, a second source terminal, and a second drain terminal, the second transistor being an enhancement mode transistor;
a gate-source interconnect forming an electrical connection between the first gate terminal and the second source terminal;
a substrate; and
a buffer layer disposed over the substrate, wherein the first transistor and the second transistor are disposed over the buffer layer; and
a drain-source interconnect forming an electrical connection between the first source terminal and the second drain terminal, wherein:
the drain-source interconnect includes an ohmic contact that makes contact with the plurality of two-dimensional carrier channels; or
the drain-source interconnect includes a doped semiconductor sidewall, and wherein the plurality of two-dimensional carrier channels terminate at the doped semiconductor sidewall; or
the drain-source interconnect includes a heterostructure, and wherein the plurality of two-dimensional carrier channels terminate at the heterostructure.