US 12,438,517 B2
Quartz vibration element and manufacturing method of quartz vibration element
Taiki Goto, Nagaokakyo (JP); Hiroshi Kumano, Nagaokakyo (JP); Kaiza Makino, Nagaokakyo (JP); Takashi Hase, Nagaokakyo (JP); and Mitsuhiro Yamada, Nagaokakyo (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Aug. 27, 2024, as Appl. No. 18/816,495.
Application 18/816,495 is a continuation of application No. PCT/JP2022/041362, filed on Nov. 7, 2022.
Claims priority of application No. 2022-045837 (JP), filed on Mar. 22, 2022.
Prior Publication US 2024/0421797 A1, Dec. 19, 2024
Int. Cl. H03H 9/19 (2006.01); H03H 3/02 (2006.01); H03H 9/10 (2006.01)
CPC H03H 9/19 (2013.01) [H03H 3/02 (2013.01); H03H 9/10 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A quartz vibration element comprising:
a quartz plate having a first principal surface and a second principal surface facing oppositely to each other;
a first driving electrode on the first principal surface of the quartz plate; and
a second driving electrode on the second principal surface of the quartz plate, wherein
when an X-axis, a Y-axis, and a Z-axis are defined as crystallographic axes of a quartz crystal of the quartz plate, an X′-axis and a Y′-axis of the quartz crystal are obtained by rotating the X-axis and the Y-axis about the Z-axis by a rotation angle φ, and a Y″-axis and a Z′-axis of the quartz crystal are obtained by rotating the Y′-axis and the Z-axis about the X′-axis by a rotation angle θ, the first principal surface and the second principal surface of the quartz plate are perpendicular to the Y″-axis, and
when one of the first principal surface or the second principal surface of the quartz plate is viewed in plan and an angle ψ is an angle between the X-axis and a long side of the quartz plate, the quartz plate satisfies both ψ=α×φ×θ and −0.0165−0.016≤α≤−0.0165+0.016 or +0.0165−0.016≤α≤+0.0165+0.016.