US 12,438,514 B2
Near synchronous dual mode surface acoustic wave resonators
Aimeric Bisognin, Antibes (FR); Jacques-Antoine Damy, Nice (FR); Charles Binninger, Saint-Jeannet (FR); Matthias Pernpeintner, Grafing b. München (DE); and Olivier Tristan, Antibes (FR)
Assigned to RF360 Singapore Pte. Ltd., Republic Plaza (SG)
Filed by RF360 SINGAPORE PTE. LTD., Republic Plaza (SG)
Filed on Sep. 12, 2023, as Appl. No. 18/465,915.
Prior Publication US 2025/0088170 A1, Mar. 13, 2025
Int. Cl. H03H 9/02 (2006.01); H03H 9/145 (2006.01); H03H 9/25 (2006.01); H03H 9/64 (2006.01)
CPC H03H 9/02992 (2013.01) [H03H 9/14544 (2013.01); H03H 9/25 (2013.01); H03H 9/6483 (2013.01); H03H 9/6489 (2013.01)] 30 Claims
OG exemplary drawing
 
1. An apparatus comprising:
a dual mode surface acoustic wave (DMS) resonator, comprising:
a piezoelectric material;
a first interdigital transducer (IDT) disposed over a surface of the piezoelectric material, the first IDT comprising:
a first busbar;
a second busbar parallel to the first busbar; and
a first plurality of IDT electrode fingers comprising first IDT electrode fingers extending from the first busbar toward the second busbar and second IDT electrode fingers extending from the second busbar toward the first busbar in an interdigitated configuration; and
a second IDT disposed over the surface of the piezoelectric material adjacent to the first IDT along an interface region between the first IDT and the second IDT, the second IDT comprising:
a third busbar;
a fourth busbar parallel to the third busbar; and
a second plurality of IDT electrode fingers comprising third IDT electrode fingers extending from the third busbar toward the fourth busbar and fourth IDT electrode fingers extending from the fourth busbar toward the third busbar in the interdigitated configuration;
wherein the first IDT and the second IDT each include a transition region comprising five or fewer electrode fingers nearest the interface region, and wherein a chirp variation in the transition region is not zero, and wherein the chirp variation in the transition region is less than plus or minus three percent.