| CPC H02P 6/006 (2013.01) [B65G 54/02 (2013.01); H02K 11/22 (2016.01); H02K 41/031 (2013.01); H02P 6/16 (2013.01); H02P 25/064 (2016.02); B65G 2203/0283 (2013.01)] | 11 Claims |
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1. A transport apparatus comprising:
a stator;
a mover that includes a first scale and is movable along the stator in a first direction;
a plurality of first detectors provided facing said first scale, wherein a position of the mover in a second direction intersecting the first direction is detected by at least two first detectors of the plurality of first detectors, the at least two first detectors facing the first scale by movement of the mover; and
a control unit that controls position and/or attitude of the mover,
wherein the first scale and the plurality of first detectors constitute an incremental encoder,
wherein the plurality of first detectors are arranged at a predetermined interval along the first direction in the stator, and
wherein, when one first detector of the plurality of the first detectors starts detecting the first scale by movement of the mover, the control unit corrects a detection value of the one first detector with a detection value of another one of the first detectors that has already detected the first scale.
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