US 12,438,337 B2
Light emitting device and projector
Hiroaki Jiroku, Suwa (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by Seiko Epson Corporation, Tokyo (JP)
Filed on Oct. 29, 2021, as Appl. No. 17/513,987.
Claims priority of application No. 2020-182873 (JP), filed on Oct. 30, 2020.
Prior Publication US 2022/0140568 A1, May 5, 2022
Int. Cl. H01S 5/042 (2006.01); H01S 5/00 (2006.01); H01S 5/323 (2006.01)
CPC H01S 5/0425 (2013.01) [H01S 5/00 (2013.01); H01S 5/323 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A light emitting device comprising:
a substrate; and
a columnar structure group formed of a plurality of columnar structures disposed on the substrate, wherein
the plurality of columnar structures includes:
a plurality of first columnar structures disposed in a light emitting section on the substrate, two adjacent first columnar structures of the plurality of first columnar structures sandwiching a first intermediate columnar structure, the first intermediate columnar structure being configured with a first bottom part and a first remaining part, a mask layer being provided at the first bottom part, a light propagating layer being provided at the first remaining part; and
a plurality of second columnar structures disposed in a region other than the light emitting section on the substrate, two adjacent second columnar structures of the plurality of second columnar structures sandwiching a second intermediate columnar structure, the second intermediate columnar structure being configured with a second bottom part and a second remaining part, the mask layer being provided at the second bottom part, an insulating layer being provided at the second remaining part,
the columnar structure group includes:
a first columnar structure group including the plurality of first columnar structures and a plurality of the first intermediate columnar structures; and
a second columnar structure group including the plurality of second columnar structures and a plurality of the second intermediate columnar structures,
the light emitting device further includes:
an inter-layer insulating layer covering the first columnar structure group and the second columnar structure group, the inter-layer insulating layer being disposed on the substrate;
a conductive layer electrically coupled to only the first columnar structure group, without being electrically coupled to the second columnar structure group, via a contact hole provided in the inter-layer insulating layer, the conductive layer being disposed on the inter-layer insulating layer and the contact hole; and
a first electrode terminal electrically coupled to the conductive layer, the first electrode terminal being disposed on the inter-layer insulating layer,
each of the plurality of first columnar structures is formed of a first semiconductor layer having a first conductivity type disposed on the substrate, a second semiconductor layer having a second conductivity type different from the first conductivity type, and a light emitting layer disposed between the first semiconductor layer and the second semiconductor layer,
the conductive layer is electrically coupled to the second semiconductor layer of only the first columnar structure group,
the conductive layer and the first electrode terminal partially overlap the second columnar structure group via the inter-layer insulating layer in a plan view, and
an outer periphery of the first columnar structure group is directly surrounded by an inner periphery of the second columnar structure group such that the plurality of first columnar structures and the plurality of second columnar structures are arranged directly adjacent to each other without having a gap therebetween.