US 12,438,334 B2
Apparatus for and method of modulating a light source wavelength
Kuo-Tai Teng, Poway, CA (US); Rahul Ahlawat, San Diego, CA (US); and Piraj Fozoonmayeh, San Diego, CA (US)
Assigned to Cymer, LLC, San Diego, CA (US)
Appl. No. 17/609,075
Filed by Cymer, LLC, San Diego, CA (US)
PCT Filed May 11, 2020, PCT No. PCT/US2020/032390
§ 371(c)(1), (2) Date Nov. 5, 2021,
PCT Pub. No. WO2020/231946, PCT Pub. Date Nov. 19, 2020.
Claims priority of provisional application 62/847,464, filed on May 14, 2019.
Prior Publication US 2022/0231474 A1, Jul. 21, 2022
Int. Cl. H01S 3/097 (2006.01); G03F 7/00 (2006.01); H01S 3/10 (2006.01); H01S 3/13 (2006.01)
CPC H01S 3/09702 (2013.01) [G03F 7/70491 (2013.01); H01S 3/10069 (2013.01); H01S 3/1305 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A laser system comprising:
an actuator having a first state in which the actuator causes a first burst of one or more pulses of laser radiation produced by the laser system to have a first reference wavelength and a second state in which the actuator causes a next burst of one or more pulses of laser radiation produced by the laser system to have a second reference wavelength different from the first reference wavelength; and
an actuator controller arranged to pre-position the actuator in a third state between the first burst and the next burst, the third state being between the first state and the second state.