US 12,438,327 B2
Bypass apparatus, laser apparatus, and electronic device manufacturing method
Shinichi Matsumoto, Oyama (JP)
Assigned to Gigaphoton Inc., Tochigi (JP)
Filed by Gigaphoton Inc., Tochigi (JP)
Filed on Dec. 28, 2023, as Appl. No. 18/399,011.
Application 18/399,011 is a continuation of application No. PCT/JP2021/030232, filed on Aug. 18, 2021.
Prior Publication US 2024/0128702 A1, Apr. 18, 2024
Int. Cl. H01S 3/00 (2006.01); G03F 7/00 (2006.01); H01S 3/23 (2006.01)
CPC H01S 3/0071 (2013.01) [G03F 7/70025 (2013.01); G03F 7/7015 (2013.01); G03F 7/70191 (2013.01); G03F 7/70308 (2013.01); G03F 7/70316 (2013.01); G03F 7/70575 (2013.01); H01S 3/0057 (2013.01); H01S 3/2308 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A bypass apparatus attachable to and detachable from a laser apparatus configured to output pulse laser light, the bypass apparatus constituting a bypass optical path that bypasses a pulse width stretching apparatus provided in the laser apparatus and configured to stretch a pulse width of the pulse laser light having entered the pulse width stretching apparatus, the bypass apparatus comprising:
a plurality of optical elements constituting the bypass optical path; and
an enclosure that houses the plurality of optical elements,
the plurality of optical elements including
a first highly reflective mirror configured to reflect the pulse laser light entering the pulse width stretching apparatus out of the pulse width stretching apparatus, the first highly reflective mirror being configured to guide the reflected pulse laser light to the bypass optical path, and
a second highly reflective mirror configured to reflect the pulse laser light reflected off the first highly reflective mirror and incident on the second highly reflective mirror through the bypass optical path to cause the reflected pulse laser light to return to a light-exiting-side optical path of the pulse width stretching apparatus.