| CPC H01L 24/05 (2013.01) [G06V 40/13 (2022.01); G06V 40/1329 (2022.01); H01L 24/16 (2013.01); H01L 24/32 (2013.01); H01L 24/73 (2013.01); H01L 23/3128 (2013.01); H01L 24/03 (2013.01); H01L 24/11 (2013.01); H01L 24/13 (2013.01); H01L 24/27 (2013.01); H01L 24/29 (2013.01); H01L 24/33 (2013.01); H01L 24/81 (2013.01); H01L 24/83 (2013.01); H01L 24/92 (2013.01)] | 19 Claims |

|
1. A sensor device comprising:
a substrate comprising:
an upper substrate side, a bottom substrate side, and lateral substrate sides between the upper and bottom substrate sides;
a dielectric structure; and
a conductive structure;
a semiconductor die having a top die side, a bottom die side, and lateral die sides between the top and bottom die sides, wherein the semiconductor die comprises a sensing unit;
a plurality of first conductive interconnection structures electrically coupling the sensing unit of the semiconductor die to the top substrate side;
a plate over the top die side;
an adhesive material adhered to the top die side and a bottom side of the plate; and
an encapsulant surrounding the semiconductor die, wherein the encapsulant extends above the top die side and contacts the plate.
|