US 12,438,078 B2
Local interconnect power rails and upper power rails
James P. Mazza, Saratoga Springs, NY (US); Navneet K. Jain, Milpitas, CA (US); Xuelian Zhu, San Jose, CA (US); Jia Zeng, Sunnyvale, CA (US); and Mahbub Rashed, Cupertino, CA (US)
Assigned to GLOBALFOUNDRIES U.S. Inc., Malta, NY (US)
Filed by GLOBALFOUNDRIES U.S. Inc., Malta, NY (US)
Filed on Apr. 19, 2022, as Appl. No. 17/723,888.
Prior Publication US 2023/0335484 A1, Oct. 19, 2023
Int. Cl. H01L 23/522 (2006.01); H01L 21/768 (2006.01); H01L 23/48 (2006.01); H01L 23/528 (2006.01); H01L 23/535 (2006.01)
CPC H01L 23/5226 (2013.01) [H01L 21/76898 (2013.01); H01L 23/481 (2013.01); H01L 23/5286 (2013.01); H01L 23/535 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A structure comprising:
a cell comprising contacts enclosed in active regions, wherein the active region includes gate structures;
at least one local interconnect power rail connecting to the contacts of the active regions, the at least one local interconnect power rail positioned over and orthogonal to the gate structures;
at least one power rail above and connected to the at least one local interconnect power rail, the at least one power rail parallel to the at least one local interconnect power rail and positioned over and orthogonal to the gate structures,
wherein the at least one local interconnect power rail and the at least one power rail comprise a same width.