US 12,438,075 B2
Method for manufacturing a laminated body
Hiroshi Yakushiji, Kanagawa (JP); Reiji Sakamoto, Kanagawa (JP); and Masahiro Shibamoto, Kanagawa (JP)
Assigned to CANON ANELVA CORPORATION, Kanagawa (JP)
Filed by CANON ANELVA CORPORATION, Kanagawa (JP)
Filed on Feb. 15, 2023, as Appl. No. 18/169,449.
Application 18/169,449 is a continuation of application No. PCT/JP2021/018766, filed on May 18, 2021.
Prior Publication US 2023/0187338 A1, Jun. 15, 2023
Int. Cl. H01L 21/48 (2006.01); C23C 14/20 (2006.01); C23C 14/34 (2006.01); C23C 14/58 (2006.01); C23C 28/00 (2006.01); C25D 7/12 (2006.01); H01J 37/305 (2006.01); H01J 37/317 (2006.01); H01J 37/32 (2006.01); H01L 23/498 (2006.01)
CPC H01L 23/49894 (2013.01) [C23C 14/205 (2013.01); C23C 14/3464 (2013.01); C23C 14/5833 (2013.01); C23C 14/5846 (2013.01); C23C 28/32 (2013.01); C23C 28/341 (2013.01); C25D 7/123 (2013.01); H01J 37/3053 (2013.01); H01J 37/3178 (2013.01); H01J 37/32082 (2013.01); H01L 21/4846 (2013.01); H01L 23/49838 (2013.01); H01J 2237/332 (2013.01); H01J 2237/334 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A laminated body manufacturing method comprising:
a first step of forming a titanium film on a resin layer;
after the first step, a second step of forming a titanium carbide layer, as a part of an adhesive layer, on the resin layer by applying energy to the titanium film;
after the second step, a third step of forming a titanium layer as another part of the adhesive layer on the titanium carbide layer; and
after the third step, a fourth step of forming a seed layer on the titanium layer,
wherein the titanium carbide layer is a layer formed with titanium from the titanium film and carbon from the resin layer, which are covalently bonded by applying the energy in a state where the titanium film is formed on the resin layer.