US 12,438,055 B2
Abnormality detection method and processing apparatus
Shingo Hishiya, Yamanashi (JP); Nobutoshi Terasawa, Sapporo (JP); Fumiaki Nagai, Sapporo (JP); Kazuaki Sasaki, Sapporo (JP); Hiroaki Kikuchi, Oshu (JP); Masayuki Kitamura, Yamanashi (JP); Kazuo Yabe, Yamanashi (JP); Motoshi Fukudome, Yamanashi (JP); Tatsuya Miyahara, Yamanashi (JP); Eiji Kikama, Yamanashi (JP); Yuki Tanabe, Yamanashi (JP); and Tomoyuki Nagata, Oshu (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Feb. 18, 2022, as Appl. No. 17/675,225.
Claims priority of application No. 2021-029150 (JP), filed on Feb. 25, 2021.
Prior Publication US 2022/0270940 A1, Aug. 25, 2022
Int. Cl. H01L 21/66 (2006.01); C23C 16/455 (2006.01); C23C 16/52 (2006.01); H01L 21/02 (2006.01)
CPC H01L 22/20 (2013.01) [C23C 16/45561 (2013.01); C23C 16/52 (2013.01); H01L 21/02057 (2013.01); H01L 21/02271 (2013.01)] 9 Claims
OG exemplary drawing
 
1. An abnormality detection method comprising:
supplying a gas controlled to a selected flow rate to a gas supply pipe via the gas pipe connected to the gas supply pipe, thereby introducing the gas into a reaction region of a processing container provided in a processing apparatus from a gas hole of the gas supply pipe;
measuring a pressure inside the gas pipe by a pressure gauge attached to the gas pipe; and
detecting an abnormality of at least one of the gas supply pipe and the gas pipe based on a rate of change in the pressure measured by the pressure gauge for the gas supply pipe with respect to a pressure measured by the pressure gauge for a new gas supply pipe.