US 12,438,053 B2
Ultrasound vibrating-type defect detection apparatus and wire defect detection system
Michael Kirkby, Tokyo (JP); Hiroshi Munakata, Tokyo (JP); and Takuya Adachi, Tokyo (JP)
Assigned to Yamaha Robotics Holdings Co., Ltd., Tokyo (JP)
Appl. No. 18/015,074
Filed by Yamaha Robotics Holdings Co., Ltd., Tokyo (JP)
PCT Filed Oct. 28, 2020, PCT No. PCT/JP2020/040416
§ 371(c)(1), (2) Date Jan. 8, 2023,
PCT Pub. No. WO2022/091247, PCT Pub. Date May 5, 2022.
Prior Publication US 2023/0253266 A1, Aug. 10, 2023
Int. Cl. G01N 21/84 (2006.01); B06B 1/02 (2006.01); G01N 21/88 (2006.01); H01L 21/66 (2006.01)
CPC H01L 22/12 (2013.01) [B06B 1/0284 (2013.01); G01N 21/8806 (2013.01); G01N 21/8851 (2013.01); G01N 2021/8864 (2013.01); G01N 2021/8896 (2013.01)] 14 Claims
OG exemplary drawing
 
1. An ultrasound vibrating-type defect detection apparatus for detecting a defect in an inspection object, the ultrasound vibrating-type defect detection apparatus comprising:
an ultrasound vibrating device ultrasonically vibrating the inspection object;
a power supply supplying high-frequency power to the ultrasound vibrating device;
an imaging device imaging the inspection object ultrasonically vibrated; and
a controller adjusting a frequency of the high-frequency power supplied from the power supply to the ultrasound vibrating device, and performing detection of a defect in the inspection object,
wherein the controller captures an image of the inspection object with the imaging device while varying the frequency of the high-frequency power supplied from the power supply to the ultrasound vibrating device, and performs detection of a defect in the inspection object based on the image captured,
the inspection object comprises a target portion subjected to detection of a defect, and a non-target portion not subjected to detection of a defect, and
the controller adjusts a voltage of the high-frequency power supplied from the power supply to the ultrasound vibrating device so that a ratio of an amplitude of the target portion detected from the image captured by the imaging device to an amplitude of the non-target portion detected from the image captured by the imaging device is equal to or greater than a predetermined value when varying the frequency of the high-frequency power supplied from the power supply to the ultrasound vibrating device.