US 12,438,052 B2
Addressable plasma delivery methods and devices
Vladimir Nagorny, Tracy, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on May 4, 2022, as Appl. No. 17/736,920.
Application 17/736,920 is a continuation of application No. 17/163,066, filed on Jan. 29, 2021, granted, now 12,027,426.
Prior Publication US 2022/0262607 A1, Aug. 18, 2022
Int. Cl. H01L 21/66 (2006.01); C03C 17/36 (2006.01); G01T 1/24 (2006.01); G05B 15/02 (2006.01); H01J 37/32 (2006.01)
CPC H01L 22/12 (2013.01) [G05B 15/02 (2013.01); H01J 37/32 (2013.01); H01J 37/32348 (2013.01); H01J 37/32926 (2013.01); H01J 37/32935 (2013.01); C03C 17/36 (2013.01); G01T 1/24 (2013.01); H01J 2237/24585 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A plasma delivery device comprising:
a memory element that stores a first state or a second state, wherein the memory element is configured to receive a first signal that causes the memory element to change between the first state and the second state;
a switch coupled to the memory element, wherein the switch is configured to change between an open configuration and a closed configuration based on the first state or the second state; and
a plasma emitter coupled to the switch, the plasma emitter configured to be selectively activated and deactivated based on the open configuration or the closed configuration of the switch, wherein responsive to being activated the plasma emitter supplies plasma related fluxes to an environment proximate the plasma delivery device, and wherein the plasma emitter is configured to receive a second signal that activates the plasma emitter based on the open configuration or the closed configuration of the switch.