US 12,438,032 B2
Chuck pin assembly, and substrate holding apparatus and liquid processing apparatus including same
Cheol Hwan Jeong, Pyeongtaek-si (KR)
Assigned to SEMES CO., LTD., Cheonan-si (KR)
Filed by SEMES CO., LTD., Cheonan-si (KR)
Filed on Dec. 17, 2021, as Appl. No. 17/554,972.
Claims priority of application No. 10-2020-0183644 (KR), filed on Dec. 24, 2020.
Prior Publication US 2022/0208596 A1, Jun. 30, 2022
Int. Cl. H01L 21/687 (2006.01); H01L 21/67 (2006.01)
CPC H01L 21/68728 (2013.01) [H01L 21/67051 (2013.01); H01L 21/6708 (2013.01); H01L 21/68707 (2013.01); H01L 21/68721 (2013.01); H01L 21/68742 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A chuck pin assembly for securing a substrate, the chuck pin assembly comprising:
a body member provided at a circumferential portion of a chuck and configured to be movable with respect to the chuck, wherein the chuck is configured to support the substrate;
a grip member configured to grip a lateral surface of the substrate; and
a rotational connection member configured to rotatably couple the grip member to the body member,
wherein the rotational connection member is configured to rotate via a second rotating center shaft of the body member,
wherein the grip member is configured to rotate via a third rotating center shaft of the rotational connection member,
wherein the grip member, when viewed in a plan view, includes at least two linear contact portions which are configured to contact at least two locations of the lateral surface of the substrate at the same time, respectively,
wherein the at least two linear contact portions are and positioned on opposite sides of the third rotating center shaft in a circumferential direction around an edge of the chuck when securing the substrate,
wherein the body member is configured to rotate via a first rotating center shaft of the body member, and
wherein the grip member vertically overlaps the body member.