US 12,438,027 B2
System for determining whether transfer robot is normal, method for determining whether transfer robot is normal, and substrate treating apparatus
Hyun Jun Kim, Chungcheongnam-do (KR)
Assigned to SEMES CO., LTD., Chungcheongnam-Do (KR)
Filed by SEMES CO., LTD., Chungcheongnam-do (KR)
Filed on Dec. 3, 2021, as Appl. No. 17/541,427.
Claims priority of application No. 10-2020-0178380 (KR), filed on Dec. 18, 2020.
Prior Publication US 2022/0199446 A1, Jun. 23, 2022
Int. Cl. H01L 21/68 (2006.01); B25J 9/16 (2006.01); B25J 19/02 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/68 (2013.01) [B25J 9/1674 (2013.01); B25J 19/02 (2013.01); H01L 21/68707 (2013.01)] 2 Claims
OG exemplary drawing
 
1. A system for determining whether or not a transfer robot configured to transfer a substrate is normal, the system comprising:
a sensor detection member attached to a moving member, the moving member configured to transfer the substrate;
a sensor member attached to a support member, the support member configured to support the moving member; and
a determination unit configured to determine whether or not the transfer robot is normal through a distance between the sensor detection member and the sensor member,
wherein the moving member is driven through a motor to transfer the substrate, and
wherein the determination unit determines:
a first location, the first location being where the sensor detection member is detected in the sensor member;
a second location, the second location being where the moving member moves from the first location by a Z phase of the motor; and
whether or not the transfer robot is normal by measuring a reference value between the second location and the first location,
wherein the determination unit performs a control, and
wherein the control periodically measures a difference value between the second location and the first location and generates an alarm when a difference between the reference value and the difference value exceeds a certain range.